In this paper, we report the results of the HCL
wet etching process to fabricate a PMN-PT single crystal piezoelectric
thin membrane. A piezoelectric thin membrane can offer the ability
to passively sense vibrations without power requirements. Furthermore
the new generation oxide material exhibits extraordinary piezoelectric
properties. The material, the single-crystal solid-solutions (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3
(PMN-PT), has been shown to possess piezoelectric coefficients and
electromechanical coupling responses significantly larger than conventional
ceramics. A four-fold enhancement in piezoelectric coefficients
and much higher efficiencies in electrical to mechanical energy
conversions have been found. Use of a PMN-PT sensor to detect, with
high sensitivity, minute amounts of waterborne pathogenic bacteria
such as E. coli O157:H7 is one promising direct application. Design
of a compact and portable PMN-PT sensor device used in produce packaging
facilities and grocery stores is a primary focus. In this paper,
we present the research results produced from the experimental work
for the PMN-PT wet etching in HCL solution.
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