PMN-PT SINGLE CRYSTAL RESONATORS FOR
ULTRA-SENSITIVE VAPOR SENSING (No. 93)
TIME:
3:30 PM
LOCATION:
GMCS-214
SPEAKER:
Kee Moon
Department of Mechanical Engineering
San DiegoStateUniversity
ABSTRACT:
We report on an experimental comparison between PMN-PT
single crystal resonators with commercially available QCM resonators showing
significant superiority for new sensors over conventional quartz. Thickness
acoustic mode resonators made out of PMN-PT film were fabricated for these
tests. The thickness mode resonators make use of a mechanically polished
PMN-PT single crystal film of thickness 30μm. The sensor response to
methanol vapor condensation shows a frequency shift for the PMN-PT resonator
1000 times larger under the same environmental conditions than the commercial
quartz microbalance sensor. A surface acoustic mode resonator using
mechanically polished PMN-PT single crystal film of thickness 100μm was
also fabricated and tested. The dimensions of the PZN-PT film sample were 5�2�0.12mm3.
Thin gold interdigitated electrodes were applied on
one side of the sample. A 50nm-thick gold film was evaporated on the surface
and patterned using standard photolithography. This resonator sample also
exhibits a resonance frequency similar to that of a commercial quartz
microbalance sensor. A large frequency drop or sensitivity is again found for
the PMN-PT sensors than the quartz sensors in this case. The frequency shift
in the PMN-PT surface mode resonator is ~300 times larger to methanol vapor
loading than in the quartz resonator.